Superconducting Y1Ba2Cu3O7−x films on Si

• DOI: 10.1063/1.100588
• Publication Date: 1988-07-18
• Authors: F. K. Shokoohi; Thirumalai Venkat...; X. D. Wu; A. Inam; C. C. Chang; E. W. Chase
• Keywords: Auger electron spectroscopy; Orthorhombic crystal system; Pulsed Laser Deposition; Deposition

By depositing YBaCuO films at low substrate holder temperatures (600 °C) using a pulsed laser, films with the orthorhombic phase exhibiting superconductivity with high zero resistance temperatures (Tc0) were produced. Tc0 values as high as 50 and 80 K were seen on films deposited directly on Si and on Si with only a 50 nm ZrO2 buffer layer, respectively. The key to the successful film deposition is the low processing temperatures involved, which minimized the interface reactions as observed by Auger electron spectrometry.