Thermal conductivity of sputtered and evaporated SiO2 and TiO2 optical coatings

• DOI: 10.1063/1.112355
• Publication Date: 2002-07-26T13:39:01Z
• Authors: David G. Cahill; Thomas H. Allen
• Keywords: Thermal conductivity measurement; Atmospheric temperature range

The thermal conductivity of SiO2 and TiO2 optical coatings are measured in the temperature range 80–400 K. For SiO2, sputtered evaporated films 77% 55% bulk value, respectively, independent temperature. Similarly, is 63% TiO2.