The electron bounce resonance in a low-pressure solenoidal inductive discharge

• DOI: 10.1063/1.1364673
• Publication Date: 2002-07-26T14:17:48Z
• Authors: Chin Wook Chung; K.-I. You; S. H. Seo; S. S. Kim; H. Y. Chang
• Keywords: 0103 physical sciences; 01 natural sciences

The electron energy distribution functions (EEDFs) are measured by a rf compensated Langmuir probe in solenoidal inductive reactor at various frequencies and 2 mTorr of argon. frequency dependence the function is clearly observed. diffusion coefficients against applied calculated from nonlocal heating theory. It found that bounce resonance electrons determine coefficient shape begins to flatten. exact condition discharge presented. reported EEDFs mainly due finite-size discharge.