Plasma parameters analysis of various mixed gas inductively coupled plasmas

• DOI: 10.1063/1.1475311
• Publication Date: 2002-07-26T14:23:32Z
• Authors: K. H. Bai; S. J. You; H. Y. Chang; H. S. Uhm
• Keywords: Mixing ratio; Electron temperature

The electron energy distribution functions and plasma parameters in various gas mixture discharges (N2,O2,CF4/He,Ar,Xe) are measured. When He is mixed, the temperature increases but density almost constant. rapidly near a mixing ratio of 1, it constant when small. In Ar discharge, constant; slightly Mixing Xe decreases temperature. varies similar way with that case. A simple two-ion-species global model used to analyze parameter variations as function ratio, agrees well experimental results.