In situ thin-film texture determination

• DOI: 10.1063/1.369519
• Publication Date: 2002-07-26T13:54:59Z
• Authors: Dmitri Litvinov; Thomas O’Donnell; Roy Clarke
• Keywords: Texture (cosmology); Reflection; Characterization

A kinematic theory of reflection high energy electron diffraction (RHEED) is presented for textured polycrystalline thin films. RHEED patterns are calculated arbitrary texture situations and any general crystallographic orientation that may be encountered in thin-film growth. It shown the pattern can used as a fast convenient tool situ characterization. The approach also permits quantitative extraction angular dispersion parameters which useful optimizing growth conditions.