Laser material processing with tightly focused cylindrical vector beams

Nanopillar Radial polarization Pulse duration
DOI: 10.1063/1.4953455 Publication Date: 2016-06-03T17:00:49Z
ABSTRACT
We demonstrate a comprehensive modification study of silica glass, crystalline silicon, and amorphous silicon film, irradiated by tightly focused cylindrical vector beams with azimuthal radial polarizations. The evidence the longitudinal field associated polarization is revealed second harmonic generation in z-cut lithium niobate crystal. Despite lower threshold ring-shaped materials, center single pulse radially polarized beam not observed. phenomenon interpreted terms enhanced reflection component at interface high-index contrast, demonstrating that inefficient for flat surface modification. Enhanced interaction light nanopillar structures produced first double-pulse irradiation also demonstrated.
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