Tunable mechanical coupling between driven microelectromechanical resonators

• DOI: 10.1063/1.4964122
• Publication Date: 2016-10-04T17:01:39Z
• Authors: G. J. Verbiest; D. Xu; M. Goldsche; T. Khodkov; S. Barzanjeh; N. von den Driesch; D. Buca; C. Stampfer
• Keywords: Comb drive; Mechanical Resonance

We present a microelectromechanical system, in which silicon beam is attached to comb-drive actuator, used tune the tension and thus its resonance frequency. By measuring frequencies of we show that actuator behave as two strongly coupled resonators. Interestingly, effective coupling rate (∼1.5 MHz) tunable with (+10%) well side-gate (−10%) placed close beam. In contrast, spring constant system insensitive either them changes only by ±0.5%. Finally, can be switch between different rates frequency at least 10 kHz.