A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma

• DOI: 10.1063/5.0174458
• Publication Date: 2024-03-18T12:47:43Z
• Authors: C. J. Hickling; S. Hall; J. R. Harrison; R. Sharples; J. W. Bradley
• Keywords: Langmuir Probe; Electron temperature; Cavity magnetron

By utilizing Field Programmable Gate Arrays in a configuration similar to that of the Mirror Langmuir Probe, it is possible bias single probe at three precise voltages sequence. These can be dynamically adjusted real-time based on measured plasma electron temperature ensure transition region always sampled. The first results have been obtained by employing this method and generated outputs temperature, ion saturation current, floating potential low pulsed-DC magnetron 500 kHz. are good agreement with analysis conventionally swept probe. This designed intention being implemented MAST-U aid study exhaust physics enable further investigation into filamentary behavior.