Strong doping reduction on wafer-scale CVD graphene devices via Al2O3 ALD encapsulation

• DOI: 10.1088/1361-6528/ad5dbb
• Publication Date: 2024-07-02T22:22:11Z
• Authors: K Dockx; M D Barnes; D J Wehenkel; R van Rijn; H S J van der Zant; M Buscema
• Keywords: Encapsulation

We present the electrical characterization of wafer-scale graphene devices fabricated with an industrially-relevant, contact-first integration scheme combined Al