Performance of low-voltage STEM/TEM with delta corrector and cold field emission gun

• DOI: 10.1093/jmicro/dfq027
• Publication Date: 2010-06-29T03:15:41Z
• Authors: T. Sasaki; H. Sawada; F. Hosokawa; Y. Kohno; T. Tomita; T. Kaneyama; Y. Kondo; K. Kimoto; Y. Sato; K. Suenaga
• Keywords: Field emission gun; Acceleration voltage; Electron gun; Dark field microscopy

To reduce radiation damage caused by the electron beam and to obtain high-contrast images of specimens, we have developed a highly stabilized transmission microscope equipped with cold field emission gun spherical aberration correctors for image- probe-forming systems, which operates at lower acceleration voltages than conventional microscopes. A delta-type corrector is designed simultaneously compensate third-order fifth-order 6-fold astigmatism. Both were successfully compensated in both scanning microscopy (STEM) (TEM) modes range 30–60 kV. The Fourier transforms raw high-angle annular dark (HAADF) Si[110] sample revealed spots corresponding lattice spacings 111 96 pm 30 60 kV, respectively, those TEM an amorphous Ge film gold particles showed 91 79 respectively. Er@C82-doped single-walled carbon nanotubes, are carbon-based samples, observed HAADF-STEM imaging atomic-level resolution.