Micromachined sensor design for optical‐fiber flow measurement

• DOI: 10.1108/02602280510577816
• Publication Date: 2005-02-23T00:06:58Z
• Authors: José Mireles
• Keywords: Microsystem

Purpose Owing to the technology growth, especially in Microsystems and Nanotechnology, new products will provide ways sense variables that are crucial for product improvement system reliability. A big concern of scientific community is measurement low level flow measurements, biomedical and/or systems on a chip approaches. Design/methodology/approach – meter concept design consists surface micromachined sensor having an optical high reflective mirror made gold, which attached unique cantilever designs bend due drag force mass flow. The bending cantilevers produces approach/depart from fiber end‐tip. light modulated using Fabry‐Perot interferometry technique determine separation fiber, corresponds Findings shows potential approach measure measurements air, gas liquids viscosity. results this concept, through finite element analysis, show material used build sensor, makes them excellent candidates fabrication. stresses materials allowable (readable) among tolerances such materials/construction‐design. not affected by electromagnetic interference does require electrical currents sense, i.e. it perfectly suited mass‐flow sensing as lab‐on‐chip applications. Originality/value Among all approaches most need either “big” turbine (dimensions over 1 cm diameter), or needed end sensor. This work proposes non‐electrical approach.