A microneedle-based glucose monitor: fabricated on a wafer-level using in-device enzyme immobilization

• DOI: 10.1109/sensor.2003.1215262
• Publication Date: 2004-05-06T16:18:03Z
• Authors: S. Zimmermann; D. Fienbork; B. Stoeber; A.W. Flounders; D. Liepmann
• Keywords: Wafer-scale integration

This paper presents a disposable minimally invasive self-calibrating continuous glucose monitor consisting of hollow out-of-plane microneedles to sample interstitial fluid from the epidermis, an integrated porous poly-Si dialysis membrane and enzyme-based flow-through sensor. The proposed system can be fabricated on wafer-level using standard MEMS technology novel in-device enzyme immobilization technique that allows patterning enzymes inside micro-scale flow channels after wafer bonding. solves compatibility issue high temperature bonding sensitive enzymes. A prototype is in order demonstrate potential for this application. Sampling through results significant sensor response