Hybrid AIR-Coupled Rangefinder with Sputtered PVD PZT and SC0.2AL0.8N PMUTs for Pulse-Echo Applications

• DOI: 10.1109/uffc-js60046.2024.10793906
• Publication Date: 2024-12-18T19:25:14Z
• Authors: David Sze Wai Choong; Daniel Ssu-Han Chen; Mantalena Sarafianou; Duan Jian Goh; Jihang Liu; Sagnik Ghosh; Prakasha Ramegowda; Srinivas Merugu; Qing Xin Zhang; Peter Chang; Amal Das; Alberto Leotti; Carla Lazzari; Domenico Giusti; Yul Koh