A 100 nm copper/low-k bulk CMOS technology with multi Vt and multi gate oxide integrated transistors for low standby power, high performance and RF/analog system on chip applications

Standby power Low-power electronics
DOI: 10.1109/vlsit.2002.1015370 Publication Date: 2003-06-25T21:52:33Z
ABSTRACT
We report a 100 nm modular bulk CMOS technology platform with multi Vt and gate oxide integrated transistors that enables device circuit co-design (M. Fukuma et al., VLSI Tech., 2000) techniques (e.g. well biasing power down/reduction) for low standby (LSP), high performance (HP), speed (HS), RF/analog system on chip (SoC) applications. The transistor performances are comparable to or better than recently reported data at the node. This also features an all-layer copper/low-k (<3.0) interlayer dielectric (ILD) backend improvement dynamic reduction (S. Parihar Proc. IEDM, 2001).
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