Nanotwinned metal MEMS films with unprecedented strength and stability

• DOI: 10.1126/sciadv.1700685
• Publication Date: 2017-06-30T22:31:12Z
• Authors: Gi-Dong Sim; Jessica A. Krogstad; K. Madhav Reddy; Kelvin Y. Xie; Gianna M. Valentino; Timothy P. Weihs; Kevin J. Hemker
• Keywords: Mechanical strength

Sputter deposited nanotwinned metal alloy films that possess exceptional properties attractive for next generation MEMS devices.