ANALYSIS OF THE MATERIAL REMOVAL RATE IN MAGNETIC ABRASIVE FINISHING OF THIN FILM COATED PYREX GLASS

• DOI: 10.1142/s0218625x1850004x
• Publication Date: 2017-03-10T06:08:44Z
• Authors: HEE HWAN LEE; SEOUNG HWAN LEE
• Keywords: Chemical Mechanical Planarization; Indentation

The material removal rate (MRR) during precision finishing/polishing is a key factor, which dictates the process performance. Moreover, MRR or wear closely related to material/part reliability. For nanoscale patterning and/or planarization on nano-order thickness coatings, prediction and in-process monitoring of necessary, because not characterizable due size effects property/process condition variations as result coating/substrate interactions. purpose this research was develop practical methodology for finishing coated surfaces. Using specially designed magnetic abrasive (MAF) acoustic emission (AE) setup, experiments were carried out indium-zinc-oxide (IZO) Pyrex glasses. After given polishing time interval, AFM indentation conducted each workpiece sample measure adhesion force coating layers (IZO), are directly changes. variation AE data compared calculated form surface measurement (Nanoview) results. experimental results demonstrate strong correlations between data. In addition, monitored signals show sensitivity structure layer, progresses.