Highly-sensitive optical waveguide sensor based on SiON using two cascaded-microring resonators

• DOI: 10.1364/acpc.2012.as4e.2
• Publication Date: 2018-09-20T22:42:21Z
• Authors: Luping Zhu; Mingyu Li; Junjun Ye; Jian-Jun He
• Keywords: Waveguide; Silicon oxynitride; Optical ring resonators

A waveguide sensor using two cascaded micro-ring resonators based on silicon oxynitride (SiON) was investigated. The refractive index change of 2.9×10-7 can be measured through intensity interrogation with a low-cost broadband light source.