Comprehensive polychromatic integral diffraction efficiency sensitivity to tilt error for multilayer diffractive optical elements with oblique incidence

• DOI: 10.1364/ao.382110
• Publication Date: 2019-12-05T16:25:54Z
• Authors: Liangliang Yang; Chenglin Liu; Renjia Guo; Yongbing Zhao
• Keywords: Diffraction efficiency

Oblique incidence is the general working state for multilayer diffractive optical elements (MLDOEs) in an imaging system. The polychromatic integral diffraction efficiency (PIDE) very sensitive to incident angle. Therefore, it necessary analyze effect of tilt error on efficiency/PIDE with oblique incidence. theoretical model relationship between and presented, analyzed. analysis comprehensive PIDE a certain range angles MLDOEs established. simulation results showed that angle incidence, tolerance can be determined by PIDE. furthermore investigated decenter based maximum method used guide formulation hybrid systems.