Compact, broadband, and low-loss silicon photonic arbitrary ratio power splitter using adiabatic taper

• DOI: 10.1364/ao.413949
• Publication Date: 2020-12-11T19:01:20Z
• Authors: Junbo Zhu; Qiu Chao; Haiyang Huang; Yingxuan Zhao; Yang Li; Lue Tao; Xiaojuan She; Han Liao; Rui Huang; Zijian Zhu; Xiang Liu; Zhen Sheng; Fuwan Gan
• Keywords: Splitter

The arbitrary ratio power splitter is widely used in photonic integrated circuits (PICs), for signal monitoring, equalization, feedback, and so on. Here we designed a fabrication-tolerant, compact, broadband, low-loss splitter. proposed was realized with an adiabatically tapered silicon rib waveguide 70 nm shallow etches <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">S</mml:mi> </mml:mrow> <mml:msub> mathvariant="normal">i</mml:mi> <mml:mn>3</mml:mn> </mml:msub> mathvariant="normal">N</mml:mi> <mml:mn>4</mml:mn> </mml:math> waveguide. fabrication analysis confirmed that both of them are robust to errors. 3D finite-difference time-domain simulations show very low excess loss (less than 0.02 dB 0.05 Si waveguide), broadband operating wavelength range (100 nm). Good tolerance standard critical dimensions make the compatible process commercial foundries.