Modelling Propagation Loss of PECVD Silicon Nitride Strip Waveguides: Evaluation andAssessment of Width Dependency

• DOI: 10.1364/cleo_at.2021.jth3a.84
• Publication Date: 2021-08-17T15:47:33Z
• Authors: Anton Buchberger; Jozef Pulko; Deborah Morecroft; Omar Basso; Jochen Kraft; Alexander Bergmann
• Keywords: Deposition

Measurements of the width-dependent propagation loss 250 nm thick silicon nitride strip waveguides at 850 wavelength indicate good agreement with theoretical model. The were fabricated by plasma-enhanced chemical vapor deposition (PECVD).