Nanoscale Absolute Grating Encoder with Wide Range Directional Discrimination Based on Asymmetric Code and Hybrid Positioning

• DOI: 10.1364/cleo_at.2024.jth2a.159
• Publication Date: 2024-09-05T16:13:57Z
• Authors: Shengtong Wang; Linbin Luo; Feifan Cao; Xinghui Li
• Keywords: Code (set theory); Rotary encoder

We propose an absolute positioning grating encoder with directional discrimination ability from coarse range to precision range, and the accuracy can reach 10 nm for a motion of several tens millimeters.