Suspended Membrane InGaAs Photonic Crystal Waveguides for ammonia sensing at λ=6.15μm

• DOI: 10.1364/cleo_si.2019.sth1f.6
• Publication Date: 2019-05-08T00:53:51Z
• Authors: Kyoung Min Yoo; Jason Midkiff; Ali Rostamian; Swapnajit Chakrav...; Ray T. Chen
• Keywords: Indium gallium arsenide

Fully suspended InGaAs waveguide devices with holey photonic crystal waveguides (HPCWs) are designed for mid-infrared sensing at λ=6.15μm in the low index contrast InGaAs-InP platform. We experimentally detect 5ppm ammonia in 1mm long suspended HPCWs. © 2019 The Author(s)