Miniature Silicon Nanobeam Resonator Tuned by GST Phase Change Material

• DOI: 10.1364/cleopr.2018.w4d.6
• Publication Date: 2018-11-20T18:51:59Z
• Authors: Linjie Zhou; Hanyu Zhang; Hao Hu; Liangjun Lu; Jianping Chen; B. M. A. Rahman
• Keywords: TK; 0211 other engineering and technologies; 02 engineering and technology; 7. Clean energy

We report a silicon optical nanobeam resonator with central hole infiltrated with a thin layer of Ge2Sb2Te5 (GST) material. The resonances can be tuned when the GST changes its phases between the amorphous and crystalline states.