Active aberration- and point-spread-function control in direct laser writing

• DOI: 10.1364/oe.20.024949
• Publication Date: 2012-10-16T20:14:10Z
• Authors: Erik H. Waller; Michael Renner; Georg von Freymann
• Keywords: Point spread function; Numerical aperture; Optical transfer function; Aperture (computer memory); Spatial filter

We control the point-spread-function of high numerical aperture objectives used for direct laser writing with a spatial light modulator. Combining aberration correction different types amplitude filters to reduce aspect ratio enhances structural and optical quality woodpile photonic crystals. Here, is crucial ensure functionality filters. Measured point-spread-functions compare well calculations structures generated by writing. The shaped not only influences maximum achievable three-dimensional resolution but also proximity effect performance