MEMS reconfigurable metamaterial for terahertz switchable filter and modulator

• DOI: 10.1364/oe.22.021326
• Publication Date: 2014-08-26T22:50:53Z
• Authors: Zhengli Han; Kenta Kohno; Hiroyuki Fujita; Kazuhiko Hirakawa; Hiroshi Toshiyoshi
• Keywords: Split-ring resonator

We demonstrate a reconfigurable metamaterial developed by surface micromachining technique on low loss quartz substrate for tunable terahertz filter application. The device implements RF-MEMS (radio frequency - micro electro mechanical systems) capacitor within split-ring resonator (SRR). Time-domain spectroscopy confirms that the tunability of SRR resonance and thus transmittance are electrostatically controlled capacitor. Due to high transparency used as substrate, exhibits contrast switching performance 16.5 dB at 480 GHz, which is also supported dynamic modulation measurement results. shows promise transmission optics.