Optimization of Cr/Sc-based multilayer mirrors for water window soft x-rays

• DOI: 10.1364/ol.523431
• Publication Date: 2024-05-13T17:00:09Z
• Authors: Evgueni Meltchakov; Blandine Capitanio; Sébastien de Rossi; Irène Papagiannouli; Pascal Mercère; Franck Delmotte
• Keywords: Water window; Soft X-rays

The development of efficient multilayer mirrors for the water window (a spectral region between absorption edges carbon and oxygen, from 284 to 543 eV) remains a challenge. As best candidate, Cr/Sc provides maximum theoretical reflectivity about 60% at near-normal incidence around Sc L 2,3 edge (397 eV). However, measured peak reflectance published so far just slightly exceeds 20%. We report on new (to our knowledge) approach design more Cr/Sc-based coatings using process nitridation chromium during deposition adding boron carbide as third material in structure. discuss strategy optimization CrN/B 4 C/Sc system based experimental studies. high 32% 396 eV was with this type coating, which is main interest various applications such x-ray microscopy.