A Friction Compensation Method in Positioning Control of Nonresonant Ultrasonic Actuator-Driven Precise Stage

• DOI: 10.1541/ieejias.126.719
• Publication Date: 2006-09-06T05:50:50Z
• Authors: Seiji Hashimoto; Kiyoshi Ohishi; Koji Kosaka; Takeo Ishikawa; Hiroshi Kubota; Tadahiro Ohmi
• Keywords: Ultrasonic motor; Observer (physics)

This research has aimed at the control system development of a non-resonant ultrasonic motor (SPIDER)-driven precision stage. SPIDER is newly developed as an actuator to achieve positioning performance required for next generation. In this paper, friction compensation firstly realized considering integral effect controllers. Next, achieved based on adaptive observer. Moreover it experimentally verified that stick-slip phenomenon prevented environmental change by proposal technique, and quick in scale resolution becomes possible.