Integration of AlN piezoelectric thin films on ultralow fatigue TiNiCu shape memory alloys

• DOI: 10.1557/jmr.2020.106
• Publication Date: 2020-05-27T09:24:00Z
• Authors: Sabrina M. Curtis; Niklas Wolff; Duygu Dengiz; Hanna Lewitz; Justin Jetter; Lars Bumke; Patrick Hayes; Erdem Yarar; Lars Thormählen; Lorenz Kienle; Dirk Meyners; Eckhard Quandt
• Keywords: 0103 physical sciences; 01 natural sciences

Abstract