A Combinatorial Approach to TCO Synthesis and Characterization

• DOI: 10.1557/proc-666-f1.6
• Publication Date: 2011-04-05T19:18:56Z
• Authors: John Perkins; Dennis Readey; Jeff Alleman; Joe del Cueto; Xiaonan Li; Tim Coutts; Renaud Stauber; Chris Duncan; David Young; Phil Parilla; Brian Keyes; Lynn Gedvilas; Davor Balzar; Qi Wang; David Ginley
• Keywords: Characterization; Combinatorial synthesis; Reflection

ABSTRACTWe have developed the deposition, characterization and analysis tools necessary for a combinatorial approach to thin film metal oxides, with a special focus on transparent conducting oxides (TCOs). We are presently depositing compositionally graded libraries using mutli-target sputtering and CVD. The initial collection of characterization tools includes UV/VIS/NIR transmission/reflection, FTIR reflectance, Raman scattering, 4-point conductivity, thickness, xray diffraction and electron microprobe. In addition to allowing for a more complete empirical optimization of TCO properties, we expect to develop an improved basic understanding of TCOs, especially in the area of p-type TCOs. This paper provides an overview of our current combinatorial material science program as applied specifically to TCOs.