Love Wave Sensor Based on PMMA/ZnO/Glass Structure for Liquids Sensing

02 engineering and technology 0210 nano-technology
DOI: 10.3390/ecsa-3-c005 Publication Date: 2016-11-25T07:25:44Z
ABSTRACT
PMMA/ZnO/glass structure was investigated to enhance Love mode sensor sentivities. The phase velocities and the attenuation of the acoustic wave propagating along the PMMA/30° tilted c-axis ZnO/glass structure contacting a viscous non-conductive liquid were calculated for different PMMA (Polymethyl methacrylate) and ZnO guiding layer thicknesses, added mass thicknesses, and liquid viscosity and density. The sensor velocity and attenuation sensitivities were also calculated for different environmental parameters. The resulted sensitivities to liquid viscosity and added mass were optimized by adjusting the ZnO and PMMA guiding layer thickness corresponding to a sensitivity peak. The present analysis is of importance in manufacturing and applications of the PMMA-ZnO-glass structure Love wave sensors for the detection of liquids properties, such as viscosity, density and mass anchored to the sensor surface.
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