Modeling and Analysis of SOI Gratings-Based Opto-Fluidic Biosensor for Lab-on-a-Chip Applications
Fluidics
Waveguide
DOI:
10.3390/photonics6020071
Publication Date:
2019-06-20T14:49:59Z
AUTHORS (3)
ABSTRACT
The design, modeling, and analysis of a silicon-on-insulator (SOI) grating coupler integrated with microfluidic channel for lab-on-a-chip applications are presented. was designed to operate at 1310 nm. simulated SOI structure consisted 220 nm top-Si device layer an waveguide, coupler, buried oxide 2 µm. A rectangular deposited on the optical light fluid interaction. fluidic flow through driven by centrifugal Coriolis forces. achieve maximum coupling efficiency optimized injection angle source. sensitivity could be analyzed evaluated using change in coupled power as function effective refractive index found 0.928 × 10−6 RIU. along micro top effectively used absorbance-based biosensor.
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