An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System

• DOI: 10.3390/s17092103
• Publication Date: 2017-09-13T14:17:32Z
• Authors: Guanglei Li; Junbo Wang; Deyong Chen; Jian Chen; Lianhong Chen; Chao Xu
• Keywords: Chemical technology; electrochemical seismic sensor; negative feedback; TP1-1185; repeatability; 01 natural sciences; 7. Clean energy; microfabrication; Article; electrochemical seismic sensor; microfabrication; negative feedback; repeatability; 0105 earth and related environmental sciences

Electrochemical seismic sensors are key components in monitoring ground vibration, which featured with high performances the low-frequency domain. However, conventional electrochemical suffer from low repeatability due to limitations fabrication and limited bandwidth. This paper presents a micro-fabricated sensor force-balanced negative feedback system, mainly composed of sensing unit including porous micro electrodes immersed an electrolyte solution circuit magnet. In this study, devices were designed, fabricated, characterized, producing comparable among individual devices. addition, bandwidths total harmonic distortions proposed without system quantified compared as 0.005-20 (feedback) Hz vs. 0.3-7 (without feedback), 4.34 ± 0.38% feedback) 1.81 0.31% (feedback)@1 Hz@1 mm/s 3.21 0.25% 1.13 0.19% (feedback)@5 (ndevice = 6, n represents number tested devices), respectively. MEMS seismometers commercial (CME 6011), higher bandwidth (0.005-20 0.016-30 Hz) lower self-noise levels (-165.1 6.1 dB -137.7 at 0.1 Hz, -151.9 7.5 -117.8 0.02 6)) Thus, device may function enabling seismometer fields requesting ultra-low frequency