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Development of bi-directional high overload silicon-based differential pressure sensitive element

Pressure overload Differential pressure
DOI: 10.37188/ope.20253302.0209 Publication Date: 2025-03-24T05:26:14Z
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AUTHORS (8)
Liqun DU
Aoqi LI
Meng LI
Xiaocheng YANG
Xiangyue MENG
Huifeng QIU
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