The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

• DOI: 10.3762/bjnano.12.25
• Publication Date: 2021-04-06T09:07:16Z
• Authors: Victor Deinhart; Lisa-Marie Kern; Jan N Kirchhof; Sabrina Juergensen; Joris Sturm; Enno Krauss; Thorsten Feichtner; Sviatoslav Kovalchuk; Michael Schneider; Dieter Engel; Bastian Pfau; Bert Hecht; Kirill I Bolotin; Stephanie Reich; Katja Höflich
• Keywords: Toolbox

Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such high patterning over large areas and different materials in reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat automated pattern creation optimization, providing full flexibility to accomplish demanding tasks. offers high-level creation, enabling large-area systematic variations geometry raster settings. It also low-level beam path control movement including sophisticated optimization tools. Three applications showcasing potential He ion nanofabrication two-dimensional material systems devices using presented.