Experimental study of Fourier transform spectrometer based on MEMS micro-mirror

• DOI: 10.3788/col201311.053003
• Publication Date: 2013-05-22T07:11:38Z
• Authors: Jianjun Chen Jian...; Yong Zhu Yong Zhu; Bo Liu Bo Liu; Wei Wei Wei Wei; Ning Wang Ning Wang; Jie Zhang Jie Zhang
• Keywords: 0103 physical sciences; 7. Clean energy; 01 natural sciences

We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238°. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm.