Femtosecond visible light induced two-photon photopolymerization for 3D micro/nanostructuring in photoresists and photopolymers

• DOI: 10.3952/lithjphys.50203
• Publication Date: 2010-07-02T18:11:43Z
• Authors: M. Malinauskas; V. Purlys; M. Rutkauskas; A. Gaidukevičiūtė; R. Gadonas
• Keywords: Visible spectrum

Laser two-photon polymerization (LTPP) has been widely reported as a tool for three-dimensional micro/nanofabrication.Femtosecond lasers are employed to form nanostructures in photosensitive resins with subwavelength resolution.We demonstrate high throughput large scanning area LTPP system based on linear motor driven stages combined Yb:KGW repetition rate (312.5 kHz) amplified laser irradiation source (515 nm second harmonic's wavelength).Femtosecond green light can be focused smaller diffraction limited spot and provides higher structuring resolution comparing commonly used Ti:sapphire (operating at NIR wavelengths) LTPP.Additionally, shorter wavelength enables process more of materials.The capacitates production having 200 lateral repeatability.By modifying focusing optics there is possibility scale up the fabrication: reduction results shortening fabrication time.The formation 3D structures size varying from tens microns millimetres.Most materials photopolymerization technology (various blends acrylates, hybrid organic-inorganic materials, epoxy resins) well suitable processing constructed system.