PSO and WCR-Based Scheduling Algorithm for Non-Identical Semiconductor Batch Processing Devices

• DOI: 10.4028/www.scientific.net/amr.186.46
• Publication Date: 2011-01-20T20:18:32Z
• Authors: Bing Hai Zhou
• Keywords: Tardiness; Semiconductor device fabrication

In semiconductor fabrications, batch processing devices (BPD) are mainly used for oxidation, diffusion, deposition and performance test operations. To optimize scheduling solutions of non-identical BPDs where existing multi-products different due dates, a heuristic method based on Particle swarm optimization (PSO) weighted cost rate (WCR) is proposed minimizing the objective earliness/tardiness(E/T) penalties. The two-level algorithm developed. Experiment results indicate that valid practical. Compared with previous algorithms, it more efficient in improving earliness/tardiness performance.