Analysis on Wrinkling of Polyimide-Base Metal Film Prepared by Pulse Arc

• DOI: 10.4028/www.scientific.net/amr.482-484.1097
• Publication Date: 2012-02-27T13:59:19Z
• Authors: Dan Dan Cheng; Yun Cheng Shi; Wei Ping Yang; Yan Feng Xie; Ze Yuan Zong
• Keywords: 0101 mathematics; 01 natural sciences

Metal films are deposited on polyimide by pulsed cathode arc. Metal film wrinkles are found by SEM. These wrinkles are caused by film stress which is from inherent defect of film materials. The soft substrate will deform with metal films because there is shear force between metal films and soft substrate surface. The film stress with soft substrate together is discussed in detail.