Dissociation of hydrofluorocarbon molecules after electron impact in plasma

• DOI: 10.48550/arxiv.2402.12473
• Publication Date: 2024-02-19
• Authors: Dmitry V. Makhov; Gregory Armstrong; Hsiao‐Han Chuang; Harin Ambalampitiya; Kateryna Lemishko; Sebastian Mohr; Anna Nelson; Jonathan Tennyson; Dmitrii V. Shalas...

The process of dissociation for two hydrofluorocarbon molecules in low triplet states excited by electron impact plasma is investigated ab initio Molecular Dynamics (AIMD). interest hydrofluorocarbons motivated their role etching microelectronic technologies. Dissociation very fast, and the reaction products can be predicted. In this work, it was found that higher relax into lowest state within a few femtoseconds due to nonadiabatic dynamics, so simplest MD on seems give reasonable estimate channels branching ratios. We provide evidence existence simple rules states. For with double bond, bonds adjacent dissociate faster than other bonds.