A hybrid graphene-siliconnitride nanomembrane as a versatile and ultra-widely tunable mechanical device

• DOI: 10.48550/arxiv.2406.11596
• Publication Date: 2024-06-17
• Authors: Mengqi Fu; Bojan Bošnjak; Zhan Shi; Jannik Dornseiff; Robert H. Blick; Elke Scheer; Fan Yang
• Keywords: Condensed Matter - Mesoscale and Nanoscale Physics; Mesoscale and Nanoscale Physics (cond-mat.mes-hall); FOS: Physical sciences; Physics - Applied Physics; Applied Physics (physics.app-ph)

Integration of 2D materials in nanoelectromechanical systems (NEMS) marries the robustness silicon-based with exceptional electrical controllability materials, drastically enhancing system performance which now is key for many advanced applications nanotechnology. Here, we experimentally demonstrate and theoretically analyze a powerful on-chip graphene integrated NEMS device consisting hybrid graphene/silicon-nitride membrane metallic leads that enables an extremely large static dynamic parameter regulation. When voltage applied to leads, force induced by thermal expansion difference between results ultra-wide frequency tuning, deformation (post-buckling transition) regulation mechanical properties. Moreover, injecting alternating can excite resonator vibrating even far beyond its linear regime without complex space consuming actuation system. Our prove compact possessing robustness, high controllability, fast response. It not only expands limit application range devices but also pushes multidimensional nanomechanical resonators into working nonlinear regime.