Locally-sealed microfabricated vapor cells filled from an ex situ Cs source

• DOI: 10.48550/arxiv.2502.10829
• Publication Date: 2025-02-15
• Authors: Linda Peroux; A. Dewilde; Ravinder Chutani; A. Mazzamurro; Jérémy Bonhomme; Andrei Mursa; Julien Clément; Abderazek Talbi; Philippe Pernod; Nicolas Passilly; Vincent Maurice
• Keywords: Atomic Physics (physics.atom-ph); FOS: Physical sciences; Physics - Applied Physics; Applied Physics (physics.app-ph); Physics - Atomic Physics

Microfabricated alkali vapor cells are key to enable miniature devices such as atomic clocks and optically pumped magnetometers with reduced size, weight power. Yet, more versatile fabrication methods still needed further expand their use cases. Here, we demonstrate a novel approach collectively fill seal microfabricated cesium using locally-sealed microchannels patterned within one of the glass substrates comprising cells. Unlike current that rely on wafer-level anodic bonding last sealing step, an based local opens path features so far limited traditional glass-blown cells, including ability deposit temperature-sensitive antirelaxation coatings, reaching lower background gas pressure without additional gettering material or filling diverse molecular species.