Self-Aligned AlGaAs/GaAs HBTs and 35 ps LCML Ring Oscillators Fabricated by Mg and P Double Implantation

• DOI: 10.7567/ssdm.1986.c-5-4
• Publication Date: 2015-11-11T00:57:02Z
• Authors: K. Morizuka; M. Asaka; N. Iizuka; K. Tsuda; J. Yoshida; J. Akagi; T. Kobayashi; Y. Ashizawa; M. Azuma
• Keywords: Ring oscillator