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Centimeter-scale High-performance Few-layer MoS<sub>2</sub> Fabricated by RF Magnetron Sputtering and Subsequent Post-deposition Annealing

Deposition Cavity magnetron
DOI: 10.7567/ssdm.2016.ps-13-06 Publication Date: 2019-06-21T07:35:02Z
Abstract Supplemental Material References Cited by
AUTHORS (7)
S. Ishihara
Y. Hibino
N. Sawamoto
T. Ohashi
K. Matsuura
H. Wakabayashi
A. Ogura
ABSTRACT
2016 International Conference on Solid State Devices and Materials,Centimeter-scale High-performance Few-layer MoS<sub>2</sub> Fabricated by RF Magnetron Sputtering Subsequent Post-deposition Annealing
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