A5032255696- Scheduling and Optimization Algorithms
- Advanced Manufacturing and Logistics Optimization
- Industrial Vision Systems and Defect Detection
- Digital Transformation in Industry
- Flexible and Reconfigurable Manufacturing Systems
- Manufacturing Process and Optimization
- Petri Nets in System Modeling
- Fault Detection and Control Systems
- Neonatal and fetal brain pathology
- Assembly Line Balancing Optimization
- Cerebral Palsy and Movement Disorders
- Advanced Control Systems Optimization
- Congenital Heart Disease Studies
Macau University of Science and Technology
2022-2024
Guangzhou Medical University
2024
Cluster tools are the key equipment in semiconductor manufacturing systems. They have been widely adopted for many wafer fabrication processes, such as chemical and physical vapor deposition processes. Reentrant flows commonly seen cluster tool operations It is very complicated to schedule with reentrant For a dual-arm two-time reentering, existing studies point out that one-wafer periodical (1-WP) can be found, it optimal terms of productivity. However, some wafers should processed at PMs...
Semiconductor manufacturing relies on a long and complex production line for wafer fabrication. In modern semiconductor fabrication plant (fab), is composed of more than 1,000 tools an overhead hoist system delivering lots among the tools. Novel technologies, such as Internet Things (IoT) software engineering are adopted in that large amounts data can be collected from Also, these should cooperate well with each other. Due to data-processing capacity limitation current fault detection...
In modern semiconductor manufacturing, the computer-integrated manufacturing system plays an essential role in automation with plenty of software systems. Among them, equipment program (EAP) is one fundamental systems to support interconnection various types equipment. For traditional EAP, communication and logic models are tightly coupled. The occurrence any exception EAP may make power down such that no reachable. Additionally, it can handle a couple tools only. extension fab makes...
In semiconductor fabs, many key processes adopt cluster tools to process wafers. For some processes, such as atomic layer deposition and plasma enhanced chemical vapor deposition, wafers with reentrant flows should be processed in tool. cases, it is necessary find a way correctly operate that can completed according wafer processing recipe (including the parameters flows) productivity of maximized. To do so, this work presents Petri net model for dual-arm robots multiple-time flows. Based on...