Midinfrared (MIR), which covers numerous molecular vibrational fingerprints, has attracted enormous research interest due to its promising potential for label-free and damage-free sensing. Despite intense development efforts, the realization of waveguide-integrated on-chip sensing system seen very limited success date. The huge lattice mismatch between silicon commonly used detection materials such as HgCdTe, III-V, or II-VI compounds been key bottleneck that hinders their integration. Here,...

Abstract Tunable metamaterial devices have experienced explosive growth in the past decades, driving traditional electromagnetic (EM) to evolve into diversified functionalities by manipulating EM properties such as amplitude, frequency, phase, polarization, and propagation direction. However, one of bottlenecks these rapidly developed metamaterials technologies is limited tunability caused intrinsic frequency‐dependent property exotic tunable material. To overcome limitation,...

Abstract Black phosphorus (BP) offers unique opportunities for mid‐infrared (MIR) waveguide photodetectors due to its narrow direct bandgap and layered lattice structure. Further miniaturization of the photodetector will improve operation speed, signal‐to‐noise ratio, internal quantum efficiency. However, it is challenging maintain high responsivities in miniaturized BP because reduced light–matter interaction lengths. To address this issue, a method utilizing slow light effect photonic...

Abstract Long-wave infrared (LWIR, 6–14 µm) processes enormous potential for chem/biosensing as it covers abundant molecular absorption fingerprints. Waveguides provide an attractive chip-scale miniaturization solution optical sensors. However, the exploration of waveguide sensors in this wavelength range is limited. Here, LWIR photonic platform fast and sensitive on-chip gas sensing developed using suspended silicon (Si) supported by subwavelength grating (SWG) metamaterial claddings. This...

Mid-infrared absorption spectroscopy plays an important role in molecule identification and quantification for widespread applications. Integrated photonics provides opportunities to perform spectroscopic sensing on-chip the minimization of device size, cost, power consumption. The integration waveguides photodetectors is indispensable step toward realization these systems. It desired extend operating wavelengths systems long-wave infrared (LWIR) range utilize more molecular fingerprints....

Abstract Metamaterials, consisting of subwavelength resonant structures, can be artificially engineered to yield desired response electromagnetic waves. In contrast the naturally existing materials whose properties are limited by their chemical compositions and optical metamaterials is controlled geometrics unit cells, called “meta-atoms”. Many exotic functionalities such as negative refractive index, cloaking, perfect absorber, have been realized in metamaterials. One recent technical...

Miniaturized infrared spectroscopy is highly desired for widespread applications, including environment monitoring, chemical analysis, and biosensing. Nanoantennas, as a promising approach, feature strong field enhancement provide opportunities ultrasensitive molecule detection even in the nanoscale range. However, current efforts higher sensitivities by nanogaps usually suffer trade-off between performance fabrication cost. Here, novel crooked nanoantennas are designed with different...

We report an aluminum nitride on insulator platform for mid-infrared (MIR) photonics applications beyond 3 μm. Propagation loss and bending are studied, while functional devices such as directional couplers, multimode interferometers, add/drop filters demonstrated with high performance. The complementary metal-oxide-semiconductor-compatible offers advantages ranging from a large transparency window, thermal chemical resistance, to piezoelectric tunability three-dimensional integration...

The surface-enhanced infrared absorption (SEIRA) technique has been focusing on the metallic resonator structures for decades, exploring different approaches to enhance sensitivity. Although high enhancement is achieved, dissipative loss and strong heating are intrinsic drawbacks of metals. Recently, dielectric platform emerged as a promising alternative. In this work, we report guided resonance-based all-dielectric photonic crystal slab SEIRA. resonance-induced in effective path length...

Vernier effect has been captivated as a promising approach to achieve high-performance photonic sensors. However, experimental demonstration of such sensors in mid-infrared (MIR) range, which covers abundant absorption fingerprints molecules, is still lacking. Here, we report effect-based thermally tunable using cascaded ring resonators fabricated on the silicon-on-insulator (SOI) platform. The radii and coupling gaps two rings are investigated key design parameters. By applying organic...

In this paper, we report a compact wavelength-flattened directional coupler (WFDC) based chemical sensor featuring an incorporated subwavelength grating (SWG) structure for the mid-infrared (MIR). By incorporating SWG into (DC), dispersion in DC can be engineered to allow broadband operation which is advantageous extract spectroscopic information MIR sensing analysis. Meanwhile, Bragg reflection introduced by produces sharp trough at wavelength. This sensitive surrounding refractive index...

We experimentally report the bidirectional reconfiguration of an out-of-plane deformable microcantilever based metamaterial for advanced and dynamic manipulation terahertz waves. The is made a bimaterial stack with large difference in coefficient thermal expansion constituent materials. This allows continuous deformation microcantilevers upward or downward direction response to positive negative temperature gradient, respectively. fundamental resonance frequency fabricated measured at 0.4...

We investigate nanocavities in deterministic aperiodic photonic crystal (PhC) nanobeams. reveal that even a single nanocavity can support multiple mode-matched resonances, which show an almost perfect field overlap the cavity region. The unique property is enabled by existence of adjustable bandgaps PhC Our investigation may inspire related studies on low threshold lasers, integrated nonlinear devices, optical filters, and on-chip sensors.

The design, fabrication, and characterization of 1-D grating waveguide as slow light structure working in mid-infrared (MIR) region are demonstrated for the first time. effects various structural parameters on properties investigated through theoretical analysis, simulation experimental verification, providing guidance engineering waveguide. By adjusting parameters, average group indices 9.4-15.5 with bandwidths 23-66 nm normalized delay-bandwidth products 0.093-0.164 obtained. Thermo-optic...

A deterministic design method and experimental demonstration of single photonic crystal nanocavity supporting both air dielectric modes in the mid-infrared wavelength region are reported here. The coexistence is realized by a proper dispersion to confine bands simultaneously. By adding central mirrors make resonance be confined at bandgap edges, high Q-factors 2.32 × 104 1.59 achieved about 3.875μm 3.728μm for fundamental modes, respectively. Moreover, multiple sets can introducing aperiodic...

Aluminum nitride on insulator (AlNOI) photonics platform has great potential for mid-infrared applications thanks to the large transparency window, piezoelectric property, and second-order nonlinearity of AlN. However, deployment AlNOI might be hindered by high propagation loss. We perform thermal annealing study demonstrate significant loss improvement in platform. After at 400°C 2 hours ambient gas environment, is reduced half. Bend taper coupling are also investigated. The performance...

We demonstrate the first black phosphorus phototransistor integrated with Si photonics waveguide system towards mid-infrared (MIR) sensing. At a wavelength of 3.78 μm, achieves high responsivity 0.7 A/W under small drain bias -1 V at room-temperature. Additionally, device offers gate and tunability to suppress dark current while simultaneously optimize photo-response performance. Our results reveal potential for MIR detection enable realization on-chip systems sensing applications.

Surface-enhanced infrared absorption (SEIRA) technique has been focusing on the metallic resonator structures for decades while dissipative loss and strong heating from metal are intrinsic drawbacks. Meanwhile, gas sensor is also challenging SEIRA because of small size weak gas. This paper reports an all dielectric photonic crystal slab (PCS) platform integrated with selective enrichment polymer polyethylenimine (PEI) as a miniaturized sensor, achieving detection limit 20 ppm fast response...

This paper reports a waveguide-integrated bigradient dielectric metalens with footprint of only 16.8×10 µm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . In mid-infrared wavelengths 3.65-3.8 um, the achieves high-efficiency in-plane focusing highest ratio wavelength to focal length/spot size (0.268 & 2.83). After subsequent optimization and design, total area has been further compressed 55.1% demonstrated mode conversion applications...

The design, fabrication and characterization of one-dimensional (1D) grating waveguide as slow light structure working in mid-infrared region are demonstrated for the first time. effects various structural parameters on properties systematically investigated through simulation experiment, providing solid guidance engineering 1D waveguide.

Many volatile organic compounds (VOCs) are regarded as major indoor pollutants and potentially threaten human health in the short- long-term. Several VOCs also indicators for specific diseases. Thus, portable selective detection of is highly desired. In this letter, a chip-scale subwavelength-engineered suspended silicon waveguide platform working long-wave infrared demonstrated toluene vapor detection. The broadband characterization presented flat transmission spectrum over measured...

Miniaturized optical spectrometer in the mid-infrared range could open numerous opportunities for widespread applications including environmental monitoring and biosensing. A recent scientific advance this field is computational based on wavelength reconstruction method, which features an ultracompact footprint. However, existing techniques still need multiple pixel arrays inevitably increases device complexity Here, we demonstrate a transfer-printed nanoelectromechanical Fabry-Pérot filter...

We design, fabricate and characterize one-dimensional (1D) grating waveguide with flat band slow light effect in mid-infrared (MIR) region for the first time. The effects of various structural parameters on properties are systematically investigated through theoretical analysis, simulation experimental verification, providing solid guidance engineering 1D waveguide. By adjusting parameters, average group indices 9.4-15.5 bandwidths 23-66 nm normalized delay-bandwidth products 0.093-0.164...

In this paper, we present a broadband directional coupler (DC) based dual mode chemical sensor for the mid-infrared (MIR). For first time, propose sensing on refractive index (RI) change in compact DC by incorporating subwavelength grating (SWG) structure into conventional that introduces sharp Bragg wavelength. Meanwhile, SWG can also engineer dispersion to achieve operation so device operate wide wavelength range benefits spectrum analysis MIR. Fivefold enhancement bandwidth compared DCs...