A5001893500- Mechanical and Optical Resonators
- Advanced MEMS and NEMS Technologies
- Force Microscopy Techniques and Applications
- Advanced Sensor Technologies Research
- Analytical Chemistry and Sensors
- Acoustic Wave Resonator Technologies
- Photonic and Optical Devices
- Adhesion, Friction, and Surface Interactions
- Semiconductor Lasers and Optical Devices
- Perovskite Materials and Applications
- Advancements in Photolithography Techniques
- Advancements in Materials Engineering
- Fuel Cells and Related Materials
- Conducting polymers and applications
- Metal and Thin Film Mechanics
- Near-Field Optical Microscopy
Wrocław University of Science and Technology
2010-2015
Technische Universität Ilmenau
2014
University of Wrocław
2012
Here we present an extension of optical beam deflection (OBD) method for measuring displacement and vibrations array microcantilevers. Instead focusing on the cantilever, is either focused above or below cantilever array, only in axis parallel to cantilevers length, allowing a wide line span multiple array. Each reflects part incident beam, which then directed onto photodiode detector manner distinguishing between individual beams. reflected behaves like single roughly same divergence angle...
Within last two years, we have shown the positive-tone, development-less patterning of calixarene molecular glass resists using highly confined electric field, current-controlled scanning probe lithography scheme. Herein, give a more detailed view insight describing applied Scanning Probe Lithography (SPL) technology platform applying selfactuating, self-sensing cantilever. The experimental results are supported by first preliminary simulation estimating local field strength, electron...
We propose a novel method for simultaneous readout of static bending and multimode resonance-frequency microcantilever. The method, as opposed to the currently most common approach, requires no external excitation microcantilever's vibrations. It utilizes intrinsic thermal Brownian noise allows monitoring frequencies several flexural torsional vibration modes simultaneously along with twisting in both gaseous liquid environments. have developed complete measurement setup investigating...
In this paper, we apply the focused ion beam technique (FIB) to add and subtract material from a microcantilever sensor use non-uniform mass sensitivity model determine position value of load. We remove defined amount cantilevers at specified positions by FIB assisted deposition milling, thus introduce Utilizing intrinsic thermal noise cantilevers, measure frequencies multiple modes flexural vibrations in ambient air before after processing. By application theoretical model, are able both,...
Here we present a homemade system for highly sensitive measurements of cantilever sensor arrays.Two unique techniques developed by our group are utilized.Firstly, the expanded beam deflection (EBD) method that allows truly simultaneous multiple cantilevers with simple optical apparatus consisting single and stationary laser beam, while providing same sensitivity as original (OBD) method.Secondly, real-time Brownian noise extraction technique combined static-dynamic mode operation in gaseous...
In this paper we propose a method for linearization of split-diode photodetector's readout characteristics in optical beam deflection (OBD) system. By assumption an invertible function-shaped laser spot's power cumulative distribution, relation between detector's output signal and the cantilever's bending can be found. A microstage electromagnetically actuated microcantilevers are used to characterize detector establish model's parameters. After linearization, differential from 2-cantilever...
Since their first applications in atomic force microscopy (AFM) micro- and nanocantilevers have been using as a very versatile tool for nanotechnology over two decades. Their cover fields of micro-and nanomanipulation, nanocalorimetry, mass sensing. Variety methods techniques actuation detection cantilevers' motion proposed widely used, each exhibiting its advantages drawbacks. In this paper we present architecture the microcantilever whose deflection is actuated electromagnetically by...
In this article authors present a method for determining optimal photoresist exposure parameters in photolithography process by an analysis of topographic profile exposed images layer. As measurement tool Atomic Force Microscopy (AFM) integrated with system maskless lithography was used. The the piezoresistive cantilever and experimental procedure described. Initial experiments result energy minimizing stitching error were presented.
For cantilever sensors, working in deflection mode, targeted functionalization of selected side is great importance for many biochemical and medical applications. To find the optimal method sensitive reference pair, we compared several protocols targeting biological molecules. Monocrystalline silicon wafers covered with native oxide layer on one gold were used as model surfaces. Our results indicate that proper effective procedure deactivation (Si/SiO2 or Au) combined surfaces crucial...
In this work, we present dual-mode measurements of chemical and biochemical microcantilever sensor arrays. Multiple microcantilevers are monitored simultaneously in our homemade nanomechanical analyzer. A single stationary optical beam is used to read bending the record their thermal noise. Added mass calculated from measured noise resonance frequency shift surface stress assessed based on static bending. We experimental data self-assembling monolayers growth, receptors immobilization,...