Abstract Due to the necessary transition renewable energy, transport of electricity over long distances will become increasingly important, since sites sustainable generation, such as wind or solar power parks, and place consumption can be very far apart. Currently, is mainly transported via overhead AC lines. However, studies have shown that for distances, DC offers decisive advantages. To make optimal use existing route infrastructure, simultaneous DC, hybrid transmission, should employed....

For vibration and displacement sensors, robustness is one of the key requirements. Optical measurement concepts are among most promising possibilities to achieve it. The presented microoptoelectromechanical system sensor modulates a light flux by means two congruently placed aperture gratings: etched into seismic mass other fixed package. Commercially available LED photodetector components at top bottom sandwich structure generate detect this modulated allow for cost-effective...

This paper presents encouraging results of a novel optoelectronic conversion method for relative displacement. An optical modulator responding to acceleration and gravitation is used characterization. The Si microelectromechanical system (MEMS) component comprise spring suspended, in-plane oscillating mass carrying an array apertures. Light flux modulation achieved with second complementary apertures that fixed the frame. investigated device comprises sandwich structure SMD LED, MEMS...

A passive thermal micro-actuator with large area specific work and displacement, fabricated of electroplated nickel on a silicon substrate is presented. The actuation relies the expansion beams in V-shaped geometry. Two beam stacks are aligned opposite to each other coupled lever transmission. actuator exhibits low energy losses due deformation structure can efficiently convert thermally induced elastic into mechanical work. An analytical model considers these energies caused by material....

A magnetostrictive actuator approach based on micromechanical structures is presented. Planar geometries are designed, comprising V-shaped beams and lever transmissions. Several stacked in parallel two of such stacks placed facing each other. Both connected to a beam. When magnetic field applied, the magnetostriction active material leads an elongation/shortening beams. The transmission converts magnetically induced elastic energy into reliable in-plane displacement. overall dimensions...

The majority of MEMS vibration sensors requires relatively high resonance frequencies several kilohertz to avoid mechanical contact moving parts such as electrode plates. In contrast that, our hybrid micro-opto-electro- system (MOEMS) enables sensor applications at low frequencies. This work describes a distinct MOEMS featuring extremely below 200 Hz. It is operated ambient air without closed loop feed- back, extensive electronics and cooling. Due the soft suspension micro-mechanical...

We present a study of the damping behavior monocrystalline silicon cantilevers in different rarefied gas regimes. Mechanical quality factors Q were analyzed at controlled ambient pressures range 0.01 Pa to 100 Pa. Emphasis was laid on investigation fundamental vibration mode. Hence, test structures harmonically excited by Lorentz force acting current carrying lead attached top surface cantilever. The micromachined clamped-free featuring length 2 mm, width 1.5 mm and thickness 20 μm,...

A miniaturised, piezoelectrically driven shaker system is presented which suitable for MEMS characterisation in vacuum. It offers a broad frequency and amplitude range. The fully vacuum compatible constructed out of one single peace aluminium with piezo-stack-actuator working in-plane against four beam springs. can easily be fabricated at low costs using hand operated milling machine. systems characteristics are tuned to different applications as the first resonance given by stiffness...

Air conditioning systems are among the major energy consumers in buildings. Energy-efficient operation of AC is an important step towards better management building automation, but requires efficient monitoring or enthalpy flows within installation, which currently still difficult because lack appropriate equipment. This paper introduces a distributed data acquisition system for large-scale based on low-cost flow sensors implemented by means standard printed circuit board technology and...

We report on design rules for the passive air damping of laterally oscillating MOEMS [1]. They allow a tailor made charac- teristic transfer function microsensor given field application. Measurements in at atmospheric pressure as well vacuum 10−4 to 10−1 mbar were accompanied by finite volume method computational fluid mechanics simulations using open source software OpenFOAM®. These combined with analytic models identify and quantify important parameters micromachined vibration sensor...

A concept of a flow sensor optimized for the use in HVAC (Heating Ventilating Air Conditioning) systems is presented. The fabrication transducer based on PCB (Printed Circuit Board) technology to keep costs low and allow easy handling replacement. complete device consists quantizer, conversion circuitry, network link. Through interaction with streaming fluid, generates an electrically measurable signal which allows determination total fluid. measurement principle modification calorimetric...

Inclination sensors are essential elements in many different fields of application such as navigation, metrology, geodetics, geoscience, well the consumer market. In general, for high precision navigation. The sensor's resolution is one key parameters to improve performance and open up new areas applications. implementation a miniaturized optical readout most promising ways accomplish this goal. This paper discusses principle novel inclination sensor along with obtained measurements two...

This paper reports a novel construction of micromachined MEMS magnetometer characterized by static magnetic fields CERN's reference dipole with custom made capacitive read-out. The flux density is via the vibration modes structure, which are sensed capacitively. device consists single-crystal silicon clamped-free plate (cantilever) carrying thin conductor. cantilever and film metal electrodes separated small gap, forming vibrating capacitor. Movements read out conveniently electronic...

Vibration and displacement sensors need to be compact for many applications in automation or consumer electronics, microelectromechanical structures are a convenient way implement such sensors. For these MEMS devices, optical readout methods have proven superior capacitive piezoresistive strategies terms of sensitivity as well noise interference immunity, however the integration light sources detectors is not easily possible. This paper presents an approach use organic optoelectronic devices...

Many upcoming experiments in antimatter research require low-energy antiproton beams. With a kinetic energy the order of 100 keV, standard magnetic components to control and focus beams become less effective. Therefore, electrostatic are being developed installed transfer lines storage rings. However, there is no equipment available precisely map check electric field generated by these elements. Instead, one has trust simulations and, therefore, depend on tight fabrication tolerances. Here...

We present a novel design of resonant magnetic field sensor with capacitive read-out permitting wafer level production. The device consists single-crystal silicon cantilever manufactured from the layer an SOI wafer. Cantilevers represent very simple structure respect to manufacturing and function. On top structure, gold lead carries AC currents that generate alternating Lorentz forces in external field. free end oscillation actuated depends on eigenfrequencies structure. Particularly,...

This contribution describes a novel magnetic field transducer based on MOEMS (micro-opto-electo-mechanical-system) readout. The silicon structure is deflected in static due to the Lorentz force deflection measured with mechano-optical [1]. transduction method modulation of perpendicularly introduced light flux. achieved by one movable optical grating suspended and second that fixed foundation system. proof-of-concept device was characterized at ambient pressure exhibiting sensitivity 200...