A5045979796- Metal and Thin Film Mechanics
- Diamond and Carbon-based Materials Research
- Semiconductor materials and devices
- Advanced materials and composites
- Advanced ceramic materials synthesis
- ZnO doping and properties
- Plasma Diagnostics and Applications
- Ion-surface interactions and analysis
- MXene and MAX Phase Materials
- Gold and Silver Nanoparticles Synthesis and Applications
- nanoparticles nucleation surface interactions
- Force Microscopy Techniques and Applications
- Electrohydrodynamics and Fluid Dynamics
- Electronic and Structural Properties of Oxides
HVM Plasma (Czechia)
2019-2023
University of West Bohemia
2013-2019
A bipolar HiPIMS discharge with a rectangular positive voltage pulse (with controllable amplitude, delay after the main negative and length) was systematically investigated by mass spectroscopy. The time-averaged spectra of ions measured at substrate position exhibit prominent high-energy peak. It is shown that peak can be varied its magnitude scales length width slightly influenced interval. Measurements plasma potential spectrometer time-resolved spectroscopy clearly show formed...
Abstract We have determined the local plasma parameters using Langmuir probe measurements with a sub-microsecond time resolution during positive voltage pulses of bipolar high-power impulse magnetron sputtering discharge an unbalanced titanium target. The effects pulse amplitude and delay between negative end initiation are investigated as well spatial dependence at three distances from From results, values average energy flux ions to substrate estimated. found that evolution has similar...