A5034276066- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Geophysics and Sensor Technology
- Innovative Energy Harvesting Technologies
- Sensor Technology and Measurement Systems
- Advanced Sensor and Energy Harvesting Materials
- Acoustic Wave Resonator Technologies
- Advanced Sensor Technologies Research
- Advanced Fiber Optic Sensors
University of Hong Kong
2020-2024
Hong Kong University of Science and Technology
2020-2024
This letter highlights a significant advancement in the miniat- urization of conventional variable reluctance sensors (VRSs) using an optimized micromachined spiral coil and cylindrical magnet. The primary objective is to create low-cost, high-performance micro-VRSs (µVRS) that can measure position, speed, proximity ferrous components. sensitivity µVRS was through theoretical analysis, aiming achieve minimum noise equivalent magnetic induction. fabrication involved cost-effective single-mask...
A two-dimensional (2D) model was developed, for the first time, to describe characteristics of micromachined thermal expansion-based angular motion (TEAM) sensor, which has been validated by experimental results. Scaling analysis on performance through 2D conducted optimize TEAM sensor's design in terms normalized distances between microheaters and temperature detectors x y directions, thickness thin film, heater width, cavity depth, temperature. Furthermore, proposed two dimensionless...
In this work, we report a single-chip integration of CMOS compatible MEMS temperature, humidity, and highly sensitive flow sensor for the application human thermal comfort (HTC) sensing. The present multi-sensors chip (MSC) comes up with couple merits. Firstly, it utilizes low-cost 3-mask fabrication process to fabricate sensors on single proper packaging layer (parylene C) that acts as both (for temperature & sensors) humidity sensing layer. Secondly, fully released thermoresistive...
We propose a novel transient PDE model for development of highly sensitive micro thermal expansion-based angular motion (μTEAM) sensors based on the study time-dependent response. With efficient prediction time constant (τ*) model, which is >2,200 times faster than 3D CFD simulation (32.67s versus >20h) and was validated by experimental results, parametric analysis has been conducted design optimization. The μTEAM with three pairs temperature detectors were adopted systematic PWM frequency (...
In this paper, we present a novel structural design of thermal expansion-based angular motion (TEAM) sensors based on systematic comparative study to improve the sensitivity. Compared with traditional TEAM sensor Heaters oriented Perpendicular temperature detectors (abbreviated PeH), employs Parallel (PaH). The dominant superiority is sensitivity enhancement without increasing chip area and power consumption, which can be attributed higher working efficiency heaters analysis proposed 2D...
In this paper, we report an advanced thermal expansion-based angular motion (TEAM) sensor with the competitive sub-deg/sec detection limit based on identified optimal heater voltage amplitude (V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">h</inf> ). Experimental results reveal major noise sources of TEAM mainly consist flicker and noise. Therein, is linearly proportional to V , while inversely frequency (f). Besides, sensitivity . Thus, a...
In this paper, we present a systematic study of the PWM frequency ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$f_{\text{PWM}}$</tex> ) effect on sensitivity thermal expansion-based angular motion (TEAM) sensor. An optimal heaters was experimentally derived for each pair temperature detectors to achieve optimized sensitivity. Based time-dependent analysis our xmlns:xlink="http://www.w3.org/1999/xlink">$2\mathrm{D}$</tex> PDE model and...
In this work, we present an integrated ambient temperature compensation method for a thermal expansion- based angular motion (TEAM) sensor system on both theoretical analysis and experimental investigations. The study using the extended 2D model indicates that sensitivity is susceptible to properties of working fluid which can be affected by (Ta). Moreover, algorithm with consideration fluid's (Compensation I) was predicted our model, first time, applied effectively compensating variation...