A5056366377- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Advanced Sensor and Energy Harvesting Materials
- Advanced Sensor Technologies Research
- Gas Sensing Nanomaterials and Sensors
- Advanced Sensor and Control Systems
- CCD and CMOS Imaging Sensors
- Heat Transfer and Optimization
- Acoustic Wave Resonator Technologies
- Wireless Power Transfer Systems
- Advanced Chemical Sensor Technologies
- EEG and Brain-Computer Interfaces
- Sensor Technology and Measurement Systems
- Flow Measurement and Analysis
- Non-Invasive Vital Sign Monitoring
Shenzhen University
2023-2025
University of Baltimore
2017
University of Maryland, Baltimore
2017
Abstract We present a system-level model with an on-chip temperature compensation technique for CMOS-MEMS monolithic calorimetric flow sensing SoC. The encompasses mechanical, thermal, and electrical domains to facilitate the co-design of MEMS sensor CMOS interface circuits on EDA platform. strategy is implemented variable difference heating circuit. Results show that linear programming low-temperature drift in SoC output characterized by resistor R c resistance value 748.21 Ω coefficient...
This article presents a complementary metal-oxide semiconductor (CMOS)-microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system, which consists of MEMS with dual pairs thermistors, precise constant temperature difference (CTD) control circuit, and low-noise readout circuit current feedback instrument amplifier (CFIA). The is fabricated using an in-house developed post-CMOS process, while its sensing structure thinned to 2.52 <inline-formula...
To date, many studies have been carried out for monitoring analytes in human perspiration with wearable sweat sensors, but few of them done an in-depth investigation on the relationship between acquired sensing data and health status from a system scenario. In this article, we report smart sensor (WS3), which can not only monitor concentration sodium ions also predict dehydration state body. The proposed WS3 consists entire three-layer Internet Things (IoT) structure. perception layer...
In this article, we present a monolithically integrated multifunctional sensor for respiratory applications, which consists of bidirectional micro flow with dual microheaters and stacked microelectromechanical systems (MEMS) temperature/humidity sensor. Importantly, the is fabricated using low-cost CMOS-compatible MEMS process. addition, humidity further coated polyimide (PI) layer to enhance its water absorption sensitivity. The performance each evaluated in conjunction interface circuit....
In this paper, we present a surface micromachined Pirani vacuum gauge integrated with stacked temperature sensor using CMOS-MEMS technology. The proposed features <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$2.23~\mu \text{m}$ </tex-math></inline-formula> thick suspended microheater, which is positioned between two designed heat sinks. upper and lower gap spacing the sink microheater...
In this paper, we have proposed a miniaturized flow sensor based on thermal feedback and digitized power distribution across two microheaters. The performance of the has been verified by nitrogen (N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> ) gas from -11 m/s to 11 m/s. Our findings show significant improvement in sensitivity, which is 10.69 %/m/s, as compared its counterpart using simple strategy with voltage redistribution....
Electroencephalography (EEG) can globally monitor neural activity in millisecond scale, which is critical for identifying causality of human brain functions and mechanisms.However, to obtain accurate EEG stimulation-response relationship one usually needs repeat multiple-ten times recording average out background signals other irreverent activities, making real-time monitoring difficult be accomplished.In this study, we explored new approaches don't require repeats.EEG were recorded from...
In this paper, we present a wireless passive pressure sensor based on LC-resonance and fabricated by flexible printed circuit board technology. The is designed with 1 mm width airhole channel for reducing the reaction force from trapped air further optimized according to proposed multi-physics coupling model, thus achieving high-sensitivity design double-sided PI-Cu-PI sandwich film deformation. As result, during wired test, resonant frequency of 206 μm thick shifts 35.4 MHz 30.6 within...